Mitutoyo FS70 Series 378 Semiconductor Inspection Microscopes

Mitutoyo FS70 Series 378 Semiconductor Inspection Microscopes

• The optical system that has originally developed for the best seller FS 60 models was further enhanced for the FS70 models. It is ideal as a microscope unit of a prober station for semiconductors. (All models CE marked.)
• The FS70L supports three types of YAG laser wavelength ranges (1064nm, 532nm and 355nm), while the FS70L4 supports two types of wavelength ranges (532nm and 266nm), thus expanding a scope of laser applications, allowing laser-cutting of thin-films used in semiconductors and liquid crystal substrates. However, Mitutoyo assumes no responsibility whatsoever for the performance and/or safety of the laser system used with Mitutoyo microscopes. a careful examination is recommended in selecting a laser-emission unit.
• Bright field, Differential Interference Contrast (DIC) and polarized observations are standard with the FS70Z. The FS70L and FS70L4 do not support the DIC method.
• By employing an inward revolver, the long working distance objectives provide excellent operatability.
• An ergonomic design with superb operatability: the FS70 employs the erect-image optical system (the image in the field of view has the same orientation as the specimen) and enlarged fine focus adjustment wheel with rubber grip coarse adjustment knob.
• Four Main Body Types:
• FS70 - Main Body (Non-Laser) with 1X- tube lens
• FS70Z - Main Body (Non-Laser) with 1X-2X Zoom Magnification Changer
• FS70L - Main Body 1X for Three YAG Laser Wave lengths 1064/532/355nm*
• S70L4 - Main Body 1X for Two Wave Length Ranges 532/266nm*

• Extra Long Working Distance Plan Apochromat Objectives
• Laser Cutting Objectives
• Long Working Distance Plan Objectives for IR, NIR, UV and NUV applications
• Differential Interference Contrast (DIC) Option for Nonlaser Configurations
• Reverse 4X Nosepiece
• Optional Motorized 4X Centerable Nosepiece
• Six-foot Cable Remote Intensity Control for Fiber Optic Illuminator
• Concentric Coarse and Fine Focus –0.1mm Rev /Fine Focus
• Manual Focus Block
• Mitutoyo Infinity Corrected Optics

Focus adjustment

Method: With concentric coarse and fine focusing wheels (right and left)

Range: 50mm travel range0.1mm/rev. for fine adjustment, 3.8mm/rev. for coarse adjustment

Trinocular tube Image: Erect image

Pupil distance: Siedentopf type, adjustment range: 51 - 76mm

Field number: 24

Tilt angle: 0º - 20º (only -TH, -THS models)

Illumination system: Reflective illumination for bright field (Koehler illumination, with aperture diaphragm)

Light source: 12V100W fiber optics, non-stepped adjustment), light guide length 1.5m, power consumption 150W

Objectives (optional): M Plan Apo-4, M Plan Apo SL, G Plan Apo

Mitutoyo FS70 Series Catalog